Description: Combinatorial UHV Thin Film Deposition Name of Work Supply of Combinatorial UHV Thin Film Deposition
Details: Combinatorial UHV Thin Film Deposition(Please refer Technical Specification) Optional Items Chiller (2 KW, 6 manifold) Turbo pump with capacity upto 700 Us along with controller (vacuum range: 1 x 10-8 Torr or better) Rotary Pump (vacuum range: 1 x 10-3) Torr or better) Magnetron Sputtering Target guns (≥ inch diameter) compatible with both DC sputtering and RF Sputtering Power supplies
Sector: Science University