Details: main item: plasma enhanced chemical vapor deposition (pecvd), inductive coupled reactive ion etching (icp-rie-f) and required utilities on turn key basis (inclusive of 1 year comprehensive warranty for both pecvd and ice-rie-f system) (for details refer annexure-i). the bidder has to quote a single price for both pecvd and ice-rie-f system combined. optional item: amc for 5 years (after completion of 1 year warranty) bidder to quote aggregate cost for 5 years one 8x8 semi-auto changeover manifold for cda spare parts (refer point no. 7 of scope of work for shared utilities for pecvd and ice-rie-f system)
Sector: Science University